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Magnetron sputtering (磁控溅射台))

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NovellusC1ND-109

NovellusC1ND-109

  • 所属分类:化学气相沉积chemical vapor deposition

  • 点击次数:
  • 发布日期:2020/06/16
  • 在线询价
详细介绍

Novellus C1-150 Electric CVD System configuration information:

1. Serial number: 9318-670

2. Year: 1993

3. Wafer size: 4 "15" 16 "

4. conveyor tire

5. process cavity

6. Process: silicon nitride, silicon oxide

7. MKS, adaptorr series pressure controller

8. RF source

9. dry pump


相关标签:Chemicalvapordeposition,novellusc1nd-109price,novellusc1nd-109wholesale化学气相沉积,NovellusC1ND-109价格,NovellusC1ND-109批发

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